FX Features


Utilizing a patented Focused eXtinction Detection scheme it can
Count and Size particles at much Higher Concentrations
than existing SPOS instruments

Sensitivity and Resolution comparable to current SPOS Technology

Accurate Particle Size Distributions

Higher Concentration NO DILUTION for some CMP Slurries

Can Detect PPB Levels of Oversized Particles

Only Simple Fluids Required

Accurate Counts

Extinction Sensor: Rugged Optical Design Make
Cleaning Issues a thing of the Past

Both Online and Laboratory Fluidic Modules Available

Modular Design allows for retrofitting to existing
AccuSizer SPOS Modular Systems